Ta. Grotjohn et al., MODELING THE ELECTROMAGNETIC-EXCITATION OF A COMPACT ECR ION FREE-RADICAL SOURCE, Review of scientific instruments, 65(5), 1994, pp. 1761-1765
The electromagnetic excitation of a discharge inside a microwave plasm
a source has been numerically modeled in the time domain. The source i
s a cylindrical, single-mode microwave-excited cavity. The time-varyin
g electromagnetic fields inside the resonant cavity, both inside and o
utside the discharge region, are obtained by applying a finite-differe
nce time-domain method to solve Maxwell's equations. The electromagnet
ic properties of the discharge load are described using a conductivity
model. The spatial electric field patterns, natural frequencies, stor
ed energy, and quality factor of a plasma-loaded, microwave-resonant c
avity are simulated. Additionally, the simulated results for a simplif
ied plasma source structure are compared to a known analytical solutio
n to verify the simulation technique.