TEXTURE OF VAPOR-DEPOSITED PARYLENE THIN-FILMS

The texture of vapor deposited parylene (poly-p-xylylene) thin films o n Si is measured using the x-ray pole figure technique to quantify the crystalline portion. The as-deposited sample is the monoclinic alpha phase where the (020) fiber texture component comprises 48% and the re maining 52% are randomly oriented crystallites. The sample annealed fo r 350-degrees-C 12 h is hexagonal beta phase with an (040) fiber textu re component of 68%. The half-width (omega) of the (040) fiber compone nt of the beta crystallites is within 25-degrees of the substrate norm al (fiber axis). In a beta(040) oriented crystallite, the polymer chai n is parallel to the Si substrate. This beta fiber texture develops by polymer chain movement and rearrangement of the as-deposited alpha fi ber texture.