IDENTIFICATION OF A MOVING PHASE OF AL2O3 BY AUGER-ELECTRON SPECTROSCOPY IN THE BACK ALUMINIZED SURFACE OF SI

Authors
CHAKRAVARTY BC ARORA NK SINGH SN DAS BK CHAKRABORTY BR SEN N
Citation
Bc. Chakravarty et al., IDENTIFICATION OF A MOVING PHASE OF AL2O3 BY AUGER-ELECTRON SPECTROSCOPY IN THE BACK ALUMINIZED SURFACE OF SI, Applied physics letters, 64(21), 1994, pp. 2847-2848
Citations number
3
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
64
Issue
21
Year of publication
1994
Pages
2847 - 2848
Database
ISI
SICI code
0003-6951(1994)64:21<2847:IOAMPO>2.0.ZU;2-9
Abstract
Backsurface aluminization of n on p silicon solar cells is preferred b ecause it can provide backsurface field and getter lifetime killing im purities. In this work, depth profiling has been done on aluminized ba cksurfaces of silicon wafers which were heat treated at 660-820-degree s-C in an ambient of POCl3 and oxygen gas mixture and a new moving pha se of Al2O3 has been detected by Auger electron spectroscopy.