T. Thundat et al., THERMAL AND AMBIENT-INDUCED DEFLECTIONS OF SCANNING FORCE MICROSCOPE CANTILEVERS, Applied physics letters, 64(21), 1994, pp. 2894-2896
The deflection of scanning force microscope cantilevers, metal coated
on one side, is significantly influenced by both thermal heating and v
ariations in relative humidity. For constant relative humidity, the de
flection of the cantilever drifts due to laser heating and eventually
reaches a steady-state value. For a thermally stabilized cantilever, t
he deflection varies linearly with relative humidity. Exposure to othe
r vapors, such as mercury, changes the inherent deflection of the cant
ilever. Relative amounts of adsorbates on the cantilever can be estima
ted from shifts in the cantilever resonance frequency with picogram ma
ss resolution. The cantilever deflection as well as changes in resonan
ce frequency due to vapor adsorption can be used as basis for novel ch
emical sensors.