Ha. Abdullah et Cr. Chatwin, DESIGN AND PERFORMANCE ANALYSIS OF AN OPTICAL PROFILOMETER FOR STAND-OFF CONTROL, Measurement science & technology, 5(5), 1994, pp. 517-525
A prototype non-contact high-bandwidth optoelectronic probe for surfac
e topology and laser materials processing stand-off control is present
ed. Radiation from a low-power laser beam is focused onto a workpiece
surface; the spatial variation in the reflected irradiance is modelled
. A Gaussian beam and radiometric system model are investigated and co
mpared with experimental results. The experimental results lie between
the Gaussian and radiometric simulations which appear to be limiting
cases. The system facilitates a measuring range of +/- 6 mm. A predict
ed performance is reported for the device. A set of experiments are pe
rformed, results are analysed and compared with the mathematical model
s. The approximate range of instrument linearity is +/- 1 mm for the 7
5 mm focal length main lens and +/- 2 mm for the 120 mm lens; in this
linear range the optimal accuracy resolution is 1 mum.