A SCANNED SOURCE-X-RAY MICROSCOPE

Authors
MICHETTE AG FEDOSEJEVS R PFAUNTSCH SJ BOBKOWSKI R
Citation
Ag. Michette et al., A SCANNED SOURCE-X-RAY MICROSCOPE, Measurement science & technology, 5(5), 1994, pp. 555-559
Citations number
13
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement science & technology → ACNP
ISSN journal
09570233
Volume
5
Issue
5
Year of publication
1994
Pages
555 - 559
Database
ISI
SICI code
0957-0233(1994)5:5<555:ASSM>2.0.ZU;2-B
Abstract
The first results using a scanning x-ray microscope, with zone plate o ptics, specifically designed for use with a laser-plasma x-ray source are reported. Unlike previous microscopes of this type, in which the s pecimens were mechanically scanned, in the present arrangement the spe cimen was kept stationary and the source was moved, the zone plate dem agnifying this movement on the specimen. Images of test specimens show an edge resolution of 0.35 +/- 0.14 mum, apparently limited by noise.