Fe-Al multilayers have been mixed with Xe+ ions at high temperatures.
The composition depth profiles have been analyzed by secondary ion mas
s spectroscopy (SIMS). It is shown that SIMS reveals the Al-rich compo
und formation inside the initial Al layers, and that this point cannot
be questioned by exaltation effect on Fe+ or Al+ ion intensities. Pha
se formation has been proved by X-ray diffraction at grazing incidence
.