Measurements of the nucleation rate of macrovacancies (''Lochkeim'' fo
rmation) on Si(001) during high-temperature sublimation are presented.
A theoretical description of macrovacancy nucleation on evaporating s
urfaces is also given. The nucleation rate is shown to follow a non-Ar
rhenius behavior as a function of temperature. The experiment is seen
to compare favorably with the theory.