Low-field electron transport properties in heavily doped n-GaAs channe
ls at 300 K are investigated by Monte Carlo simulation. The matrix ele
ment for electron-impurity scattering is obtained from the Fourier-tra
nsformed Coulomb potential accounting for the screening effects of the
two-dimensional electron gas. The effects of the screening and the im
purity profile are analysed. Electron mobility is calculated for sever
al values of sheet electron density and n-GaAs thickness. For low shee
t electron density, the calculated mobility increases with the sheet e
lectron density and is almost independent of n-GaAs thickness. For hig
h sheet electron density, the mobility approaches a constant value and
becomes independent of sheet electron density. These findings are exp
lained for the first time as a transition from a two- to three-dimensi
onal nature and are well confirmed by our experiments.