THE EFFECT OF ATOMIC-HYDROGEN ON DIAMOND-LIKE CARBON-FILM PRODUCTION

A method of making quantitative measurements of atomic hydrogen levels in diamond-like carbon (DLC) deposition plasmas is discussed. Multiph oton laser induced fluorescence (MPLIF) is used to detect ground state hydrogen atoms. The choice of excitation scheme to maximize the ratio of fluorescence signal to ionization is explained. The MPLIF measurem ents are calibrated using a combination of a flow reactor and titratio n absolute standard, and a transferable hot filament atomic hydrogen s ource specifically designed for installation in the DLC deposition sys tem. The characteristics of the complete system are described, and ini tial measurements in hot filament reactors are presented.