HIGH GAP SPUTTERED DLC LAYERS

Adherent and transparent unhydrogenated DLC layers were deposited by m eans of r.f. and d.c. magnetron sputtering at low deposition temperatu res. The optical gap value increases from 0.7 to 2.2 eV when depositio n pressure is increased from 10(-2) to 10(-1) Torr. In high gap materi als, large amounts of sp3 hybridized carbon atoms are present. When Al contacts are evaporated in coplanar configuration on these high gap m aterials, rectifying and photoelectrical effects are observed.