THIN-FILM SIC AS AN OPTICAL AND OPTOELECTRONIC MATERIAL

Authors
KROTZ G MULLER G DERST G WILBERTZ C KALBITZER S
Citation
G. Krotz et al., THIN-FILM SIC AS AN OPTICAL AND OPTOELECTRONIC MATERIAL, DIAMOND AND RELATED MATERIALS, 3(4-6), 1994, pp. 917-921
Citations number
17
Categorie Soggetti
Material Science
Journal title
DIAMOND AND RELATED MATERIALS → ACNP
ISSN journal
09259635
Volume
3
Issue
4-6
Year of publication
1994
Pages
917 - 921
Database
ISI
SICI code
0925-9635(1994)3:4-6<917:TSAAOA>2.0.ZU;2-J
Abstract
Thin-film SiC in its various crystalline (c-) and amorphous (a-) forms exhibits a number of properties which make these materials interestin g for optical and optoelectronic applications. This paper describes th e preparation and properties of such films and demonstrates applicatio ns with respect to colour detection as well as to optical lithography and data storage.