CVD DIAMOND GROWTH ON GERMANIUM FOR IR WINDOW APPLICATIONS

Citation
Ca. Rego et al., CVD DIAMOND GROWTH ON GERMANIUM FOR IR WINDOW APPLICATIONS, DIAMOND AND RELATED MATERIALS, 3(4-6), 1994, pp. 939-941
Citations number
13
Categorie Soggetti
Material Science
ISSN journal
09259635
Volume
3
Issue
4-6
Year of publication
1994
Pages
939 - 941
Database
ISI
SICI code
0925-9635(1994)3:4-6<939:CDGOGF>2.0.ZU;2-I
Abstract
We show that the production of adherent polycrystalline diamond films upon Ge substrates by chemical vapour deposition is problematical for three reasons: (a) the melting point of Ge is close to the optimum dia mond deposition temperature which leads to partial melting of the Ge s urface, retarding diamond nucleation, (b) there is no Ge carbide layer formed at the interface to bond the diamond to the Ge chemically and (c) there is a large thermal expansion mismatch between diamond and Ge , resulting in cracking and flaking off of the films. Barrier layers o f silicon dioxide, nitride or amorphous Si 1 mum thick prevent the Ge surface melting, but do not alleviate the expansion mismatch problem. The resulting three-layer sandwich crazes upon cooling, with the delam ination occurring at the Ge-barrier interface.