A new ion-selective membrane composition for an ISFET based on mono- a
nd bifunctional methacrylates is developed; the membrane can be deposi
ted and photolithographically structured on a wafer containing the ISF
ETs. Compatibility of the polymer matrix with various plasticizers com
monly used in PVC-based ion-selective membrane formulations is establi
shed and it is shown that the membrane may hold up to 45% of different
plasticizers. The characteristics of a calcium-sensitive ISFET with t
he developed membrane are presented and the applicability of the photo
curable polymer for potassium-sensitive membrane formation is shown.