FABRICATION OF A HYBRID FIELD-EFFECT STRUCTURE FOR GAS-DETECTION WITHDIVERSE SENSITIVE MATERIALS

We have developed a novel hybrid technique for manufacturing gas-sensi ng field-effect structures with an air gap. It is possible to find an optimum non-critical range for all technological parameters to ensure reliable evaluation of a work-function response caused by a gas reacti on. To prove the efficiency of the device, room-temperature gas measur ements with the well-known Pt (sensitive layer) and H-2 (gas) system h ave been carried out. Samples that are identically produced show repro ducible signals of the same magnitude. Simultaneously we have recorded the electrical response of a platinum-coated Kelvin probe. It is show n that the results are transferable to those obtained by the Kelvin pr obe.