ANALYSIS OF THE COMPOSITION OF SR-BI-CA-CU-PB-O FILMS OBTAINED BY MAGNETRON SPUTTERING

Citation
Vm. Vereshchaka et al., ANALYSIS OF THE COMPOSITION OF SR-BI-CA-CU-PB-O FILMS OBTAINED BY MAGNETRON SPUTTERING, Powder metallurgy and metal ceramics, 35(5-6), 1996, pp. 241-243
Citations number
5
Categorie Soggetti
Material Science, Ceramics","Metallurgy & Metallurigical Engineering
ISSN journal
10681302
Volume
35
Issue
5-6
Year of publication
1996
Pages
241 - 243
Database
ISI
SICI code
1068-1302(1996)35:5-6<241:AOTCOS>2.0.ZU;2-C
Abstract
The composition of thin films of superconducting Sr-Bi-Ca-Cu-Pb cerami c, deposited by magnetron sputtering from targets prepared from oxide powders of the corresponding elements, was investigated. It was found that the film composition differs from that of the target. Microprobe analysis of target and films can be used to determine the correct targ et composition for the deposition of a superconducting film.