STRUCTURE AND PROPERTIES OF REACTIVELY SPUTTERED GAMMA-MO2N HARD COATINGS

Authors
ANITHA VP VITTA S MAJOR S
Citation
Vp. Anitha et al., STRUCTURE AND PROPERTIES OF REACTIVELY SPUTTERED GAMMA-MO2N HARD COATINGS, Thin solid films, 245(1-2), 1994, pp. 1-3
Citations number
8
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
245
Issue
1-2
Year of publication
1994
Pages
1 - 3
Database
ISI
SICI code
0040-6090(1994)245:1-2<1:SAPORS>2.0.ZU;2-7
Abstract
The microstructure, mechanical properties and microhardness of Mo-N fi lms deposited on stainless steel are studied in detail. X-ray and elec tron diffraction studies show that the films consist of a polycrystall ine gamma-Mo2N phase. The microstructure was found to be independent o f the type of substrate, stainless steel, silicon and glass used for d eposition. The microhardness of the films was found to be 23.1 +/- 1.5 GPa, indicating that they may be used as hard protective coatings.