STUDY OF PRODUCTS FORMED FROM THE REACTIO N BETWEEN ALUMINUM HALIDES AND AMMONIA DURING ALUMINUM NITRIDE SYNTHESIS .2. NITROGEN-COMPOUNDS THERMOLYSIS AND ALUMINUM NITRIDE SYNTHESIS
M. Pouget et al., STUDY OF PRODUCTS FORMED FROM THE REACTIO N BETWEEN ALUMINUM HALIDES AND AMMONIA DURING ALUMINUM NITRIDE SYNTHESIS .2. NITROGEN-COMPOUNDS THERMOLYSIS AND ALUMINUM NITRIDE SYNTHESIS, Journal de chimie physique et de physico-chimie biologique, 91(5), 1994, pp. 547-561
In recent years, aluminum nitride synthesis has been realized from the
reaction between AlX3 and NH3. The resultant compounds (AlX3, 6 NH3)
are treated under ammonia atmosphere. These compounds have a different
nature according to halide and thus are going to lead to different de
composition mechanisms. These will be described thanks to study of var
ious pyrolysis (under ammonia, nitrogen, reduced pression). The crysta
llized aluminum nitride is obtained from 900-degrees-C under ammonia f
low whatever the precursor is. The synthesis rate is low. This one is
explained by NH4X presence, bi-product of the synthesis. NH4X interact
s with aluminum compounds to form volatil complexes carried by gaseous
flow. The best rate is obtained with AlI3 precursor though decomposit
ion mechanisms of AlI3, 6 NH3 are more complicated than those of AlBr3
, 6 NH3 or AlCl3, 5 NH3.