W. Schmitt et al., ANGLE-RESOLVED X-RAY-FLUORESCENCE SPECTROMETRY USING SYNCHROTRON-RADIATION AT ELSA, Fresenius' journal of analytical chemistry, 349(1-3), 1994, pp. 144-145
Measurements on the centroid depth of ion-implanted phosphorus-in-sili
con specimen by the method of angle-resolved, self-ratio X-ray fluores
cence spectrometry (AR/SR/XFS) have been carried out using 'white' syn
chrotron radiation (SR). The measurements were performed using a modif
ied wavelength-dispersive fluorescence spectrometer. Problems due to t
he use of SR, like carbonaceous specimen contamination and sample heat
ing were overcome by flooding the specimen chamber with helium and by
pre-absorbing the non-exciting parts of the incident SR with suitable
filters, respectively. The decaying primary intensity was monitored by
measuring the compensation current of the photoelectrons emitted from
a tungsten wire stretched across the primary beam. Results have been
obtained for specimen with dose density levels of 10(16) cm-2 and 3 x
10(15) cm-2.