ANGLE-RESOLVED X-RAY-FLUORESCENCE SPECTROMETRY USING SYNCHROTRON-RADIATION AT ELSA

Measurements on the centroid depth of ion-implanted phosphorus-in-sili con specimen by the method of angle-resolved, self-ratio X-ray fluores cence spectrometry (AR/SR/XFS) have been carried out using 'white' syn chrotron radiation (SR). The measurements were performed using a modif ied wavelength-dispersive fluorescence spectrometer. Problems due to t he use of SR, like carbonaceous specimen contamination and sample heat ing were overcome by flooding the specimen chamber with helium and by pre-absorbing the non-exciting parts of the incident SR with suitable filters, respectively. The decaying primary intensity was monitored by measuring the compensation current of the photoelectrons emitted from a tungsten wire stretched across the primary beam. Results have been obtained for specimen with dose density levels of 10(16) cm-2 and 3 x 10(15) cm-2.