CALIBRATION OF DEPTH PROFILES OF MICROPARTICLES MEASURED WITH PLASMA-BASED SECONDARY NEUTRAL MASS-SPECTROMETRY

Authors
GOSCHNICK J SCHURICHT J ACHE HJ
Citation
J. Goschnick et al., CALIBRATION OF DEPTH PROFILES OF MICROPARTICLES MEASURED WITH PLASMA-BASED SECONDARY NEUTRAL MASS-SPECTROMETRY, Fresenius' journal of analytical chemistry, 349(1-3), 1994, pp. 203-205
Citations number
4
Categorie Soggetti
Chemistry Analytical
Journal title
Fresenius' journal of analytical chemistry → ACNP
ISSN journal
09370633
Volume
349
Issue
1-3
Year of publication
1994
Pages
203 - 205
Database
ISI
SICI code
0937-0633(1994)349:1-3<203:CODPOM>2.0.ZU;2-A
Abstract
A gravimetric method is presented for the easy determination of sputte r erosion rates for powders, applicable also to non-conducting materia ls. Measurements of the erosion rates of 22 powders gave an average va lue of 0.4 nm/s +/-50% for bombardment with 400 eV Ar+ at 1 mA/cm2. Th e validity of the data has been demonstrated with technical pigments a nd outdoor aerosol particles.