CALIBRATION STANDARDS FOR COMPOSITION-DEPTH PROFILES OF NONSTOICHIOMETRIC TITANIUM NITRIDE COATINGS

Authors
STOCK HR HOHL F MAYR P
Citation
Hr. Stock et al., CALIBRATION STANDARDS FOR COMPOSITION-DEPTH PROFILES OF NONSTOICHIOMETRIC TITANIUM NITRIDE COATINGS, Fresenius' journal of analytical chemistry, 349(1-3), 1994, pp. 208-209
Citations number
1
Categorie Soggetti
Chemistry Analytical
Journal title
Fresenius' journal of analytical chemistry → ACNP
ISSN journal
09370633
Volume
349
Issue
1-3
Year of publication
1994
Pages
208 - 209
Database
ISI
SICI code
0937-0633(1994)349:1-3<208:CSFCPO>2.0.ZU;2-N
Abstract
Five different TiN(x) coatings have been deposited on steel substrates by reactive magnetron sputtering. A quantitative analysis was carried out in two ways. The coatings were initially analysed by GDOS and aft er removing the coatings from the substrates and digesting the TiN(x) powder, nitrogen was quantified by the Kjeldahl technique and titanium by AAS. A comparison of the results shows that AAS and Kjeldahl resul ts correlate very well, whereas GDOS results deviate from these two me thods systematically.