ARXPS-ANALYSIS AND MORPHOLOGY OF SPUTTERED NANOCRYSTALLINE TIC SIC COATINGS/

ARXPS (angle resolved X-ray photoelectron spectroscopy) measurements a re used to obtain informations about surfaces and grain boundaries. Da ta acquired from nanocrystalline carbidic hard coatings have been empl oyed to establish structural models. Magnetron-sputtered coatings of T iC, SiC and TiC/SiC were examined. In such coatings, partly defective TiC nanocrystallites are surrounded by interfacial carbide. This exces s carbon shows a binding state similar to that of doped graphite or fu llerenes. X-ray amorphous SiC is found in the residue. On top of sputt ered SiC coatings, less oxide and graphite is found as compared to TiC /SiC or TiC coatings.