CHEMICAL ASPECTS OF PREPARATION OF THIN-F ILMS OF HIGH-TEMPERATURE SUPERCONDUCTORS

The techniques for preparation of thin films of high - temperature sup erconductors can be divided into two groups: physical and chemical. In contrast to the physical methods, which are based on physical adsorpt ion of vapours on substrates, in the chemical ones, the metals are dep osited on heated substrates in course of thermal decomposition of suit able precursors. This paper gives a survey on the chemical background of the most important techniques from chemical methods: the chemical v apour deposition and aerosol spray deposition. The role of the applied technique, thermal stability of the precursors and some other experim ental parameters on the structure and microstructure of the obtained t hin films is discussed.