LOW-TEMPERATURE DEPOSITION OF HEXAGONAL FERRITE FILMS BY SPUTTERING

Pb-substituted Ba-ferrite films were prepared at various substrate tem perature T(s) by dc magnetron sputtering and their crystallographic ch aracteristics and magnetic properties were investigated. The substitut ion of Pb facilitates the crystallization and improves the crystallini ty for hexagonal M phase. All of the films prepared at T(s) above 460- degrees-C exhibit a good c-axis orientation and the c-axis dispersion angle (DELTAtheta50) for Pb-substituted Ba-ferrite films is as small a s 1-degrees. The coercivities (H(c perpendicular-to)) and H(c parallel -to)) and saturation magnetization M(s) of Pb-substituted Ba-ferrite f ilms are 0.7-1.0 kOe, 0.2 kOe and 250-300 emu/cm3, respectively.