The microstructure, anisotropic magnetoresistance, and magnetic proper
ties of Ti/Ni81Fe19 thin films have been investigated with respect to
annealing temperatures (T(A)) up to 450-degrees-C as well as to anneal
times (t(A)). It has been shown that 120-degrees-C is the optimum ann
ealing temperature and that t(A) has no significant influence on the p
roperties with annealing at 270-degrees-C. Auger depth profiling was u
sed to study interdiffusion kinetics. The diffusivity D and activation
energy epsilon have been estimated at about 2.0 X 10(-17) cm2/s and 1
.69 eV, respectively.