The possibilities for application of metal hydrides in hydrogen ion so
urces are considered. Typical advantages of using metal hydrides are e
ase of hydrogen storage, purification and supply, as well as providing
hydrogen evacuation of a vacuum system. The increased efficiency of d
ifferent physical effects in hydrogen ion sources by introducing metal
hydride elements is demonstrated. Results of testing prototype hydrog
en ion sources containing hydrogen-gettering zirconium alloys are pres
ented.