REDISTRIBUTION OF COMPONENTS IN THE ALTERED LAYER FORMED BY PREFERENTIAL SPUTTERING

A model for the redistribution of atoms in the altered layer formed by ion bombardment and based on the processes of preferential sputtering and mutual diffusion is considered. The calculated results are compar ed with experimental results for two- and three-component alloys. It i s concluded that preferential sputtering and mutual diffusion are the prevailing processes determining the redistribution of atoms in the al tered layer which occurs after variation of the parameters of the ion beam. It is shown that an increase in sputtering rate results in a red istribution of atoms in the altered layer, leading to a temporary incr ease in the depleted component and a temporary decrease in the enriche d component at the surface.