The development of a computer-controlled spectrophotometer that enable
s measurement of spectral transmittance, reflectance, and optical loss
of thin-film specimens is discussed. We alw describe the design and t
esting procedure of the spectrophotometer, incorporating test sample p
erformance data. In the visible region the overall photometric accurac
y is verified to be 0.1% and 0.2% for transmittance and reflectance, r
espectively. The wavelength scale is accurate to within 0.5 nm with a
reproducibility of 0.1 nm.