Monocrystalline (0001) quartz surfaces may present two kinds of imperf
ections point defects (surface oxygen vacancies) and tridimensional di
sorder (superficial amorphization). The point defects are studied than
ks to Reflection Electron Energy Loss Spectroscopy experiments, which
show that electronic transitions (5.1 and 7.2 eV) associated with surf
ace oxygen vacancies appear in the gap of alpha-quartz under ion or el
ectron bombardment and 900-degrees-C vacuum heating. The defects respo
nsible for these structures are located in the first nm under the surf
ace. X-ray Absorption Near Edge experiments (XANES) at the O K-edge sh
ow that the 900-degrees-C vacuum heating leads moreover to the destruc
tion of the surface crystallinity (almost-equal-to 5 nm), as proved by
the modification of the multiple scattering structures.