Artificial multilayer neutron supermirrors are composed of discrete se
ts of bilayer structures based on Ni and Ti layers with graded thickne
sses and with high scattering contrast between individual layers. Vari
ous samples consisting of NiX(x)/TiY(y) (X = C, N, dry air, Y = H, V)
periodic multilayers and supermirrors, as well as NiX(x) and TiY(y). m
onolayers were deposited on normal float-glass, borkron glass and on s
ilicon substrates using d.c. magnetron sputtering. The structure and s
tability of these thin films is the object of a detailed study mainly
by means of X-ray diffraction, TEM, AFM and neutron reflectometry. The
addition of N to the Ni layers yields a Ni lattice dilatation, a reor
ientation of the Ni grains from {111} to {200} parallel to the layer s
urface, a reduction of the grain size, a smoothing of the layer surfac
es (R(r.m.s) approximately 0.3 nm for d = 10 nm), a sharpening of the
multilayer interfaces and an enhancement of the scattering length dens
ity (nb = 9.53 x 10(-4) nm-2 for Ni-N). Similar results are obtained w
ith C and dry air, which in addition suppress the diffusion of Ni into
Ti. The addition of V to the Ti layers shows a smoothing of the layer
surfaces and helps to suppress interdiffusion in multilayers, leading
also to sharp and stable interfaces. Large neutron supermirrors made
of 40 bilayers of Ni-N-O/Ti-V with a reflectivity in the range of 90%
to 94% at glancing angles up to more than twice the critical angle of
total reflection from an ordinary Ni surface have been achieved and ar
e fabricated in mass production.