MEASUREMENT OF PARTICLE EMISSIONS FROM CLEAN ROOM GAS-HANDLING COMPONENTS

Particle emissions from clean room gas-handling components were measur ed by following a test method developed recently by SEMATECH. Three ty pes of tests, namely, the static, the dynamic, and the impact tests we re conducted to determine particle emissions from the components teste d. Particles emitted by the components such as valves, point-of-use fi lters and inline pressure regulators were measured using a condensatio n nucleus particle counter. The number of particles emitted by the val ve was influenced by the actuator pressure used to open and close the test valve. That is, the higher the actuator pressure the higher the n umber of particles released from the automatic valve. Particle contrib utions measured from valves, filters, and regulators are presented her e.