MEASUREMENT OF MOISTURE AND TOTAL HYDROCARBON CONTRIBUTIONS BY VALVESUSED IN CLEAN ROOM GAS-DELIVERY SYSTEMS

Moisture and total hydrocarbon (THC) emissions from valves used in cle an room gas-distribution systems were measured by following two test m ethods developed recently by SEMATECH. Each test method consists of tw o types of tests: a purge test and a bakeout test. The apparatus speci fied in each test method is similar except for the detector. Simply by switching the detectors, the same apparatus may be used for both test methods. We report measurements of THC and moisture made with this ap paratus and carried out on both manual and automatic all metal stainle ss steel valves with either Kel-F(R) or tetrafluoroethylene gaskets, s ome new (fresh out of the bag) and some used.