X-RAY-DIFFRACTION FROM LATERALLY STRUCTURED SURFACES - CRYSTAL TRUNCATION RODS

X-ray-diffraction measurements from single-crystalline GaAs(001) surfa ce gratings are presented. The experiments were performed using a thre e-crystal diffractometer. The vicinity of the (004) Bragg reflection f or five samples was investigated in detail. Model calculations based o n the kinematical crystal truncation rod theory are able to explain al l measurements quantitatively. Mesoscopic grating parameters as well a s microscopic surface roughnesses of the samples were obtained from fi ts of the data. For three samples scanning electron microscope picture s were taken. The analysis of these pictures leads to the same mesosco pic parameters as obtained from x-ray Bragg diffraction.