Ag. Steele et al., POSTGROWTH TUNING OF QUANTUM-WELL INFRARED DETECTORS BY RAPID THERMALANNEALING, Journal of applied physics, 75(12), 1994, pp. 8234-8236
The peak detection wavelength of an operational quantum-well infrared
photodetector structure has been red shifted using rapid thermal annea
ling to partially intermix the well and barrier layers. Successive ann
eals at 850-degrees-C were used to tune an 8.13 muM detector continuou
sly out to 9.13 muM. All of the fabricated detectors were operational
in spite of very long annealing times of up to 300 s. The peak spectra
l responsivity at a device current of 10 muA dropped from 0.62 to 0. 1
2 A/W after the longest anneal time, but the broadband responsivity on
ly dropped by a factor of 3 due to a simultaneous increase in the dete
ction spectral bandwidth.