A SIMPLE AND LOW-COST TECHNIQUE FOR ELECTROLESS DEPOSITION OF CHALCOGENIDE THIN-FILMS

Authors
Citation
I. Grozdanov, A SIMPLE AND LOW-COST TECHNIQUE FOR ELECTROLESS DEPOSITION OF CHALCOGENIDE THIN-FILMS, Semiconductor science and technology, 9(6), 1994, pp. 1234-1241
Citations number
17
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Condensed Matter","Material Science
ISSN journal
02681242
Volume
9
Issue
6
Year of publication
1994
Pages
1234 - 1241
Database
ISI
SICI code
0268-1242(1994)9:6<1234:ASALTF>2.0.ZU;2-N
Abstract
A simple and economical electroless chemical deposition technique for deposition of several metal sulphides and selenides is presented. Aque ous solutions of metal salts and of sodium thiosulphate or sodium sele nosulphate were used for the chemical bath. The technique is based on hydrolytic decomposition of the various metal-thiosulphate or metal-se lenosulphate complexes in aqueous media, at a suitable temperature, co ncentration and pH. The technique presented in this paper has been suc cessfully used for deposition of Cu2S, CuS, PbS, Sb2S3 and Sb2-xBixS3 in acidic media, and Ag2S, Cu2Se and PbSe in alkaline media, on variou s substrates, such as glass, metal, plastics, alumina, silicon and sap phire. Depending on the deposition time and the individual system, fil ms of thicknesses up to 0.3 mum were obtained from a single bath. The prospects of this technique are very good for multilayer combinations, solid solutions, and possibly ternary compounds as well. This techniq ue was found to be suitable for any size and shape of substrate. It is a non-polluting and economical technique, since the bulk precipitates are of a relatively high purity and can be used as semiconducting pow ders, mineral pigments etc. The optimal conditions for deposition of e ach kind of film are described and the corresponding x-ray diffraction patterns are presented. Optical spectra in the wavelength interval be tween 300 and 2500 nm for each of the films are also supplied. The she et resistivity and type of conductivity for each kind of film have als o been determined.