I. Grozdanov, A SIMPLE AND LOW-COST TECHNIQUE FOR ELECTROLESS DEPOSITION OF CHALCOGENIDE THIN-FILMS, Semiconductor science and technology, 9(6), 1994, pp. 1234-1241
A simple and economical electroless chemical deposition technique for
deposition of several metal sulphides and selenides is presented. Aque
ous solutions of metal salts and of sodium thiosulphate or sodium sele
nosulphate were used for the chemical bath. The technique is based on
hydrolytic decomposition of the various metal-thiosulphate or metal-se
lenosulphate complexes in aqueous media, at a suitable temperature, co
ncentration and pH. The technique presented in this paper has been suc
cessfully used for deposition of Cu2S, CuS, PbS, Sb2S3 and Sb2-xBixS3
in acidic media, and Ag2S, Cu2Se and PbSe in alkaline media, on variou
s substrates, such as glass, metal, plastics, alumina, silicon and sap
phire. Depending on the deposition time and the individual system, fil
ms of thicknesses up to 0.3 mum were obtained from a single bath. The
prospects of this technique are very good for multilayer combinations,
solid solutions, and possibly ternary compounds as well. This techniq
ue was found to be suitable for any size and shape of substrate. It is
a non-polluting and economical technique, since the bulk precipitates
are of a relatively high purity and can be used as semiconducting pow
ders, mineral pigments etc. The optimal conditions for deposition of e
ach kind of film are described and the corresponding x-ray diffraction
patterns are presented. Optical spectra in the wavelength interval be
tween 300 and 2500 nm for each of the films are also supplied. The she
et resistivity and type of conductivity for each kind of film have als
o been determined.