ABLATION OF WIDE BAND-GAP MATERIALS BY MULTIWAVELENGTH IRRADIATION USING A VUV RAMAN LASER

Authors
SUGIOKA K WADA S TASHIRO H TOYODA K
Citation
K. Sugioka et al., ABLATION OF WIDE BAND-GAP MATERIALS BY MULTIWAVELENGTH IRRADIATION USING A VUV RAMAN LASER, Applied surface science, 110, 1997, pp. 179-183
Citations number
7
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
110
Year of publication
1997
Pages
179 - 183
Database
ISI
SICI code
0169-4332(1997)110:<179:AOWBMB>2.0.ZU;2-2
Abstract
Ablation of wide band-gap materials such as crystal quartz, sapphire, and lithium niobate by a vacuum-ultraviolet (VUV) Raman laser is demon strated. Simultaneous irradiation of multi-wavelength beams emitted fr om the VUV Raman laser realizes high-quality ablation with smooth surf ace, little thermal influence, and little deposition of debris for all materials. The basic mechanism of high-quality ablation of each mater ial is discussed on the basis of band-gap and lattice energy.