SELECTIVE SURFACE MODIFICATION OF CERAMICS WITH LASER-RADIATION

Laser-assisted processes that enable the direct fabrication of conduct ing structures and contacts on ceramic substrate materials (AW, Al2O3) through modification are presented. These can serve as an alternative to conventional methods of thick film, thin film and chemical metalli zation. A method for fabrication of conductive structures on Al2O3 wit h CO2 laser irradiation (lambda = 10.6 mu m) is developed and a corres ponding procedure for AIN with excimer laser irradiation(lambda = 248 nm) is examined. The changes of resistance in the modified areas depen dent on the processing variables are investigated and correlated to th e results of a chemical analysis by means of electron beam microprobe.