DEPOSITION OF BATIO3 THIN-FILMS BY A HYBRID DC-FIELD ENHANCED PLD-PROCESS

BaTiO3 thin films are deposited onto (111)-Si/Ti/Pt using a hybrid DC- field enhanced pulsed laser deposition (PLD)-technique with excimer la ser radiation. Space- and time-resolved plasma emission spectroscopy ( PES) is used for determination of the mean velocity of the particle sp ecies within the plasma/vapour. The structural properties of the films are characterised by XRD-measurements and micro-Raman spectroscopy. T he electrical properties are analysed by impedance measurements. The e lectric field influences the number of excited and ionised particles w ithin the ambient gas and plasma, caused by a discharge in the ambient gas and interaction between ambient gas and plasma. The hybrid proces s allows production of crystalline films of the tetragonal phase at re duced deposition temperatures. Dielectric constants of up to epsilon(r )=320 are obtained.