CONTROL OVER THE LATERAL DISTRIBUTION OF HYDROGEN CONTENT IN THE PULSED-LASER DEPOSITED DIAMOND-LIKE CARBON-FILMS

We propose a method of controllable variation of the hydrogen content along the lateral direction of the pulsed-laser deposited DLC films. H ydrogen incorporates into the film by the adsorption of atmosphere hyd rocarbon molecules on the growing surface in a vacuum chamber. The var iation of hydrogen content is provided by use of the angular distribut ion of a carbon mass flow in a laser plume and by means of cleaning of f the adsorbed hydrocarbons with help of impinging by laser-ablated ca rbon particles under oblique angles to the substrate. Deposition of DL C films at different angles of incidence of laser-ablated carbon flow reveals the decrease of the hydrogen content at the periphery of the f ilm from 22 down to < 3 at% as the angle changes from normal to the ob lique one, while hydrogen content in the centre of the film remains ne arly constant at a level of 10 at%.