PRODUCTION OF A METALLIC THIN-FILM ON ALN SURFACE BY UV LASER-RADIATION

The effect of KrF excimer laser irradiation on aluminum nitride (AIN) surface in air for different irradiation conditions has been analyzed by Auger electron spectroscopy (AES), Raman spectroscopy and X-ray pho toelectron spectroscopy (XPS) to monitor the changes in the chemical c omposition of the near surface layer. Irradiation with pulses of fluen ces exceeding 2 J/cm(2) results in formation of a thin film of aluminu m on the AIN surface. This leads to an increase in the surface electri cal conductivity. Local transformation of an insulator to a material w ith a conducting surface in a small depth could be interesting for app lications such as microelectronics where this material is used.