Epitaxial growth of Nd:Y3Al5O12 (Nd:YAG) films on SGGG (Zr- and Sc-dop
ed Gd3Ga5O12) and YAG substrates by pulsed laser deposition using a Kr
F excimer laser at substrate temperatures of 800 degrees C to 910 degr
ees C was investigated. The composition of the films was investigated
by Rutherford backscattering spectroscopy and the crystallinity by X-r
ay diffraction analysis. The optical properties of Nd:YAG thin films w
ere investigated by photoluminescence (PL) measurements. The PL spectr
um of the Nd:YAG film on the YAG substrate exhibited F-4(3/2) --> I-4(
9/2) and F-4(3/2) --> I-4(11/2) transitions of Nd3+ ions in YAG which
were almost the same as those of the Nd:YAG bulk crystal.