STRUCTURAL-PROPERTIES OF LASER-DEPOSITED METALLIC ALLOYS AND MULTILAYERS

Pulsed laser deposited (PLD) metallic alloys and multilayers are chara cterized by the formation of amorphous or metastable nanocrystalline p hases with high solid solubilities, unusually enlarged lattice spacing s in growth direction and intermixed interfaces. The differences to sp uttered and evaporated samples are discussed with respect to the high instantaneous deposition rate, which is about 10(5) times larger than during sputtering or thermal evaporation, and the high kinetic energy of the deposited particles of up to more than 100 eV at high laser flu ences inducing atomic mixing, a large number of defects and a high str ess in the deposited films.