EXCIMER-LASER DOPING FOR ULTRASHALLOW JUNCTIONS

Authors
WEINER KH
Citation
Kh. Weiner, EXCIMER-LASER DOPING FOR ULTRASHALLOW JUNCTIONS, Solid state technology, 37(6), 1994, pp. 30
Citations number
NO
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
37
Issue
6
Year of publication
1994
Database
ISI
SICI code
0038-111X(1994)37:6<30:EDFUJ>2.0.ZU;2-V