FAST CRYOPUMP REGENERATION FOR SPUTTERING APPLICATIONS

Authors
MUNDINGER HJ BOOTH G
Citation
Hj. Mundinger et G. Booth, FAST CRYOPUMP REGENERATION FOR SPUTTERING APPLICATIONS, Solid state technology, 37(6), 1994, pp. 77
Citations number
3
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
37
Issue
6
Year of publication
1994
Database
ISI
SICI code
0038-111X(1994)37:6<77:FCRFSA>2.0.ZU;2-I
Abstract
A new procedure for rapid cryopump regeneration is described which, in one application, reduced regeneration time for three pumps to under 1 hour, increased system availability by 25%, and reduced vacuum system maintenance by more than 50%.