CHARACTERIZATION OF IRO2-SNO2 THIN-LAYERS BY ELECTRON AND ION SPECTROSCOPIES

Thin layers of mixed iridium-tin oxides, deposited on Ti foils, were s tudied by inductively coupled plasma emission spectroscopy (ICPES) and a number of surface sensitive spectroscopies and microscopies in orde r to characterize both the overall composition of the layers and their surface state. The ICPES analysis allowed a determination of the aver age content of Ir and Sn in the bulk. The surface analysis performed b y means of X-ray photoelectron spectroscopy revealed the existence of IrO2 and SnO2 in the layers while scanning Auger microprobe showed dis tinct surface enrichment with Ir. In the near surface region, up to ap proximately 700 nm in depth, the Ir content detected with Rutherford b ackscattering spectroscopy and energy dispersive X-ray spectroscopy wa s 20-40% higher than in the bulk. Reasons for the non-homogeneity in t he distribution of IrO2 and SnO2 in the