DEPOSITION OF MICROMETER-SIZED TUNGSTEN PATTERNS BY LASER TRANSFER TECHNIQUE

Authors
KANTOR Z TOTH Z SZORENYI T TOTH AL
Citation
Z. Kantor et al., DEPOSITION OF MICROMETER-SIZED TUNGSTEN PATTERNS BY LASER TRANSFER TECHNIQUE, Applied physics letters, 64(25), 1994, pp. 3506-3508
Citations number
15
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
64
Issue
25
Year of publication
1994
Pages
3506 - 3508
Database
ISI
SICI code
0003-6951(1994)64:25<3506:DOMTPB>2.0.ZU;2-L
Abstract
A simple single-step technique for surface patterning is presented. It is shown that well-adhering micrometer-sized patterns of 100% coverag e preserving the shape and dimensions of the ablated area can be depos ited by ablating and transferring tungsten thin films in the form of s ingle solid pieces using single pulses of peak power up to 100 mW and 100 mus-1 ms duration from a diode-pumped YAG laser.