J. Koskinen et al., NANOLAYERED GRADIENT STRUCTURES AS AN INTERMEDIATE LAYER FOR DIAMOND COATINGS, DIAMOND AND RELATED MATERIALS, 3(8), 1994, pp. 1107-1111
A molybdenum/titanium multilayered film was used as an intermediate fi
lm between a diamond-like carbon (DLC) coating and steel and silicon s
ubstrates. The elastic properties of the Mo/Ti intermediate layer were
modified by using a gradient thickness of the titanium films. An atte
mpt was thus made to obtain a smooth gradient of the elastic modulus f
rom the substrate (steel, 210 GPa) to the DLC film (300 GPa). The Mo/T
i multilayer was deposited in a sputter deposition unit with two sputt
er targets and a rotating substrate holder. The hydrogen-free DLC coat
ing was deposited with a pulsed arc discharge method. The Mo/Ti film w
as characterized by several sophisticated methods, such as cross-secti
on scanning force microscopy, cross-section transmission electron micr
oscopy, Rutherford backscattering spectroscopy and nano-indentation. T
he film has a layered structure with a columnar growth. Preliminary te
sts of the mechanical properties were performed by using a scratch tes
t. On silicon the Mo/Ti film detached at a slightly higher critical lo
ad compared with the DLC film with no intermediate film. However, poor
adhesion of the Mo/Ti film to the steel substrate prevented evaluatio
n of the mechanical properties of the sample.