NANOLAYERED GRADIENT STRUCTURES AS AN INTERMEDIATE LAYER FOR DIAMOND COATINGS

Citation
J. Koskinen et al., NANOLAYERED GRADIENT STRUCTURES AS AN INTERMEDIATE LAYER FOR DIAMOND COATINGS, DIAMOND AND RELATED MATERIALS, 3(8), 1994, pp. 1107-1111
Citations number
8
Categorie Soggetti
Material Science
ISSN journal
09259635
Volume
3
Issue
8
Year of publication
1994
Pages
1107 - 1111
Database
ISI
SICI code
0925-9635(1994)3:8<1107:NGSAAI>2.0.ZU;2-H
Abstract
A molybdenum/titanium multilayered film was used as an intermediate fi lm between a diamond-like carbon (DLC) coating and steel and silicon s ubstrates. The elastic properties of the Mo/Ti intermediate layer were modified by using a gradient thickness of the titanium films. An atte mpt was thus made to obtain a smooth gradient of the elastic modulus f rom the substrate (steel, 210 GPa) to the DLC film (300 GPa). The Mo/T i multilayer was deposited in a sputter deposition unit with two sputt er targets and a rotating substrate holder. The hydrogen-free DLC coat ing was deposited with a pulsed arc discharge method. The Mo/Ti film w as characterized by several sophisticated methods, such as cross-secti on scanning force microscopy, cross-section transmission electron micr oscopy, Rutherford backscattering spectroscopy and nano-indentation. T he film has a layered structure with a columnar growth. Preliminary te sts of the mechanical properties were performed by using a scratch tes t. On silicon the Mo/Ti film detached at a slightly higher critical lo ad compared with the DLC film with no intermediate film. However, poor adhesion of the Mo/Ti film to the steel substrate prevented evaluatio n of the mechanical properties of the sample.