MICROFABRICATED SURFACE-PLASMON SENSING SYSTEM

The microfabricated surface plasmon sensor is a hybrid system that int egrates optical, mechanical and electronic components. The sensor cont ains elements that are common to numerous electro-optical systems, cre ating a miniature optical bench. The microsystem elements include a si ngle-mode optical fiber, a graded index collimating lens, a scanning r otating micro-mirror, a cavity filled with index matching fluid, and a position sensitive photodiode. The elements are both laterally and ve rtically aligned using multi-substrate bonding and positive component- to-component alignment.