DESIGN AND FABRICATION OF AN OVERHANGING XY-MICROACTUATOR WITH INTEGRATED TIP FOR SCANNING SURFACE PROFILING

Authors
INDERMUEHLE PF LINDER C BRUGGER J JAECKLIN VP DEROOIJ NF
Citation
Pf. Indermuehle et al., DESIGN AND FABRICATION OF AN OVERHANGING XY-MICROACTUATOR WITH INTEGRATED TIP FOR SCANNING SURFACE PROFILING, Sensors and actuators. A, Physical, 43(1-3), 1994, pp. 346-350
Citations number
22
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
43
Issue
1-3
Year of publication
1994
Pages
346 - 350
Database
ISI
SICI code
0924-4247(1994)43:1-3<346:DAFOAO>2.0.ZU;2-Q
Abstract
This paper presents a microsystem consisting of an overhanging xy-micr ostage with integrated tip and comb actuators for scanning surface pro filing. The design is optimized with result to precise xy positioning at low drive voltages and accurate detection of vertical deflection. T he structure-is micromachined in monocrystalline silicon, requiring on ly three masks and combining various techniques such as KOH and sacrif icial layer etching, silicon fusion bonding and wet isotropic and dry anisotropic etching.