DEVELOPMENT OF PIEZOELECTRIC MICROMOVEMENT ACTUATOR FABRICATION USINGA THICK-FILM DOUBLE-PASTE PRINTING METHOD

A new type of low-voltage (<40 V) Pb0.97Nd0.02(Ti0.45Zr0.55)O3 multila yer actuator has been realized by thick-film hybrid technology. A new DPP (double-paste printing) method has been developed for the multilay er printing of actuators. For the characterization of the actuator per formance, piezoelectric constants (d33 = 315 X 10(-12) m/V), displacem ents (0-200 nm), resonances (f=0-400 kHz) and forces of actuators unde r the action of d.c. and a.c. electric fields are determined. Interfer ometric displacement measurements and a thick-film printed integrated combination of an actuator and a force sensor are used for these measu rements. The response to the complex combination of mechanical and ele ctrical loads is explored using round-type test devices prepared accor ding to the model design (diameter 5 mm).